Capra Products: High Power Microscopes

Manual KL-Series Leadscrew Measuring Microscope Stage

K66 Leadscrew Microscope Stage for Reflected Light

Semprex KL-Series Leadscrew measuring stages offer the following features:

Individual X and Y leadscrew controls for fine movement and quick-release handles for rapid positioning
Available with 1 or 0.5 micron resolution linear encoders
Thin cross-section (0.96" to 1.6") for wide variety of microscopes
Large variety of accessories for mask and wafer inspection
Proprietary KORE-FRAME design directly links X and Y axes in single piece of metal, providing excellent precision
Linear accuracy calibrated to less than 1 micron error in 5000; flatness and straightness of travel better than 1 in 5000
Stainless steel leadscrews with anti-backlash nut provide fine resolution and accurate control
Roller bearing slide mechanism made from single piece hardened alloy steel uses cross-roller bearings for extra precision and rigidity
2-axis digital readout and RS232 serial interface included

PART #	DESCRIPTION
12-6480.00 12-6482.00	K64 Leadscrew Stage, 6x4 X-Y, Transm. w/Glass K64 Leadscrew Stage, 6x4 X-Y, Reflected
12-6680.00 12-6682.00	K66 Leadscrew Stage, 6x6 X-Y, Transm. w/Glass K66 Leadscrew Stage, 6x6 X-Y, Reflected
12-8880.00 12-8882.00	K88 Leadscrew Stage, 8x8 X-Y, Transm. w/Glass K88 Leadscrew Stage, 8x8 X-Y, Reflected
14-2101.00 14-2100.50 14-2111.00	X-Y Linear Enc. (4-8"), 1 micron, with Digital Readout X-Y Linear Enc. (4-8"), 0.5 micron, with Digital Readout X-Y Linear Enc. (10"), 1 micron, with Digital Readout
14-2910.00	Optional PC-DRO Metrology Software (PC compatible)
14-3009.12	Optional Z-Axis Measuring Indicator (30mm), 0.25 micron w/3rd Axis for DRO

For more information, call Capra at (508) 650-9700 .

Telephone: (508) 650-9700

Email: info@capraoptical.com