- New 300 by 200 millimeter steel stage on VMR-3020 with ball
screw design cross roller bearing guides. (Fast, Accurate, Durable)
- New dual ring programmable oblique LED illuminators, each ring
has 8 independent segments.
- Improved stage accuracy with new design lower coefficient of
expansion scales with 0.1-micron resolution.
- More stringent stage accuracy specifications, all stages are
U2 compliant.
- High accuracy, high speed through the lens Laser with 8-micron
spot size. Scans a 1000 points a second and has a 25-millimeter working distance.
- Faster image acquisition and improved system speed with a progressive
scan black and white camera.
- New Telecentric 15:1 zoom optical system with 0.3 numerical
aperture and 25 millimeter working distance.
- New separate system controller with all electronics along with
halogen episcopic and diascopic illumination built in. This removes heat
source and vibration from fan illuminators from main stand.
- High-speed local area network connection (LAN) between the
system controller and the computer improves program run time along with
improved laser and video auto focus performance.
- New VMR Automeasure software includes CAD Reader, Offline Programming,
Profiling Software, and Programming Wizards. (All standard)
- Improved measuring accuracy with New Patented High Accuracy
edge probes developed by Nikon.
- DC Servo Motor control, 150-mm/sec-stage speed with 3020 and
300 mm/sec with 6555.
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- Stroke (Xx Yy Zz) (Standard): 300 x 200 x 150 mm (11.8 x 7.9x
5.9) in.
- Minimum readout: 0.1mm
- Maximum work piece weight: 20kg (44.0 lb.)
- Measuring accuracy at 20C+/-0.5K:
- U1x U1y: '1.5 + 4L/1000 mm
U2xy (Standard): ''2.5 + 4L/1000 mm
Z-axis guide accuracy: (1.5+L/150) mm
- Camera: B/W Progressive Scan camera or color CCD camera
- Maximum specimen height (Standard): 105mm
- Zoom Head Magnification and Field of View: Type 1: 0.5- 7.5x,
9.33 x 7.00mm - 0.622 x 0.467; Type 2: 1- 15x, 4.67 x 3.50mm - 0.311x 0.233mm;
Type 3: 2 - 30x, 2.33 x 1.75mm - 0.155 x 0.117mm
- Auto Focus: (TTL)Through the lens laser and video auto focus
- Power Source: AC 100 to 240 V+/- 10%, 50/60 Hz
Power Consumption: Approximately 7A
- Dimensions and Weight:
Main Body Only: 500(W) x 690(D) x 1195(H) mm, 160kg; 19.7(W)
x 27.2(D) x 47(H) in., 352.7lb Main Body & Table: 690(W)
x 730(D) x 1725(H) mm, 200kg; 27.2(W) x 28.8(D) x 67.9(H) in., 440.9lb
Controller: 250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D)
x 19.7(H) in., 44.1lb Foot Print: 2100(W) x 1100(D)
mm; 82.7(W) x 43.3(D) in.
- Host Computer:
Main unit: IBM PC/AT compatible (Windows® 2000) CRT: 21-inch
color
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